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三维电场传感器综述

A Review of Three-Dimensional Electric Field Sensors.

作者信息

Li Xiaonan, Gu Yu, Li Zehao, He Zijian, Yang Pengfei, Peng Chunrong

机构信息

School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.

Beijing Key Laboratory for Sensors, Beijing Information Science and Technology University, Beijing 100192, China.

出版信息

Micromachines (Basel). 2025 Jun 24;16(7):737. doi: 10.3390/mi16070737.

DOI:10.3390/mi16070737
PMID:40731646
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12300256/
Abstract

Three-dimensional electric field sensors (3D EFSs) can simultaneously measure electric field components in three mutually orthogonal directions and comprehensively capture the spatial distribution and dynamic changes of the electric field. They can be widely used in atmospheric science, smart grids, aerospace, target detection, and other fields. This paper deeply analyzes the latest progress in 3D EFSs, focusing on four major types of sensors: DC field mill, electro-optic effect, capacitive sensing, and microelectromechanical system (MEMS). It elaborates on their working principles, structural design, and decoupling calibration methods. At the same time, the advantages and disadvantages of various types of 3D EFSs and their applications in different fields are analyzed. Finally, the challenges faced by 3D EFS technology and its future development direction are discussed.

摘要

三维电场传感器（3D EFS）可以同时测量三个相互正交方向上的电场分量，并全面捕捉电场的空间分布和动态变化。它们可广泛应用于大气科学、智能电网、航空航天、目标探测等领域。本文深入分析了3D EFS的最新进展，重点关注四种主要类型的传感器：直流场磨、电光效应、电容传感和微机电系统（MEMS）。阐述了它们的工作原理、结构设计和解耦校准方法。同时，分析了各类3D EFS的优缺点及其在不同领域的应用。最后，讨论了3D EFS技术面临的挑战及其未来发展方向。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/5ab7426697e0/micromachines-16-00737-g015.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/4721ab785caf/micromachines-16-00737-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/b389edf60271/micromachines-16-00737-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/6669a75f46f2/micromachines-16-00737-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/c87807ebe110/micromachines-16-00737-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/ea1cf13393af/micromachines-16-00737-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/720378da2718/micromachines-16-00737-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/9425d60ec425/micromachines-16-00737-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/b8f12c3b479b/micromachines-16-00737-g008a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/1855bf875199/micromachines-16-00737-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/cc7ca5a9e031/micromachines-16-00737-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/4721ab785caf/micromachines-16-00737-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/237efca67274/micromachines-16-00737-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d32c/12300256/5ab7426697e0/micromachines-16-00737-g015.jpg

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