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光致发光铕钛氧化物薄膜的组合溅射

Combinatorial sputtering of photoluminescent europium titanium oxide thin films.

作者信息

Chen Junfeng, Rao Jeff, Aria Adrianus Indrat

机构信息

Surface Engineering and Precision Centre, Faculty of Engineering and Applied Sciences, Cranfield University UK

出版信息

RSC Adv. 2025 Aug 1;15(33):27415-27428. doi: 10.1039/d5ra04076k. eCollection 2025 Jul 25.

Abstract

Photoluminescent thin films were fabricated using a combinatorial physical vapour deposition (PVD) sputtering process, enabling rapid variation of europium oxide (EuO) in titanium dioxide (TiO) with concentrations varying from = 0-1 in = Eu/(Eu + Ti). Combinatorial sputtering enables synthesising samples with diverse compositions faster than traditional sol-gel, powder mixing, solvo/hydrothermal, and melt-quench processes. Post-heat treatment at 600 °C produced changes to the phase, structure and optical properties of the thin films. Scanning electron microscopy (SEM) revealed vertically oriented columnar microstructures in samples with concentrations lower than = 0.5, exhibiting a narrower average columnar width of about 50 nm after annealing at 600 °C. X-ray diffraction (XRD) analysis indicated that TiO was in the anatase phase while EuO crystallises in a monoclinic structure. The nanocrystalline grain size exhibits noticeable changes after annealing. Fluorescence spectroscopy was used to study the photoluminescence of thin films. The excitation peak at 394 nm (F → L) measures spectral emissions, with the strongest emission at 613 nm (D → F).

摘要

采用组合物理气相沉积(PVD)溅射工艺制备了光致发光薄膜,该工艺能够使二氧化钛(TiO)中的氧化铕(EuO)快速变化,其浓度在x = Eu/(Eu + Ti) 中从x = 0到1变化。组合溅射能够比传统的溶胶 - 凝胶、粉末混合、溶剂/水热和熔体淬火工艺更快地合成具有不同成分的样品。在600°C下进行后热处理会使薄膜的相、结构和光学性质发生变化。扫描电子显微镜(SEM)显示,浓度低于x = 0.5的样品中存在垂直取向的柱状微观结构,在600°C退火后,平均柱状宽度约为50 nm,更窄。X射线衍射(XRD)分析表明,TiO为锐钛矿相,而EuO结晶为单斜结构。退火后纳米晶粒尺寸呈现出明显变化。使用荧光光谱研究薄膜的光致发光。394 nm处的激发峰(F → L)测量光谱发射,最强发射在613 nm处(D → F)。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/802c/12314876/1aa6b7c444cc/d5ra04076k-f1.jpg

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