Walker Seth, Schmidt Holger, Hawkins Aaron R
Electrical and Computer Engineering Department, Brigham Young University, 450 Engineering Building, Provo, UT 84602, USA.
School of Engineering, University of California, Santa Cruz, CA 95064, USA.
Photonics. 2024 Jun;11(6). doi: 10.3390/photonics11060502. Epub 2024 May 25.
We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Four waveguide designs are demonstrated, which have different numbers of thin-film reflecting layers. We demonstrate that optical loss decreases with additional reflecting layers, with measured loss coefficients as low as 1 cm.
我们报告了在覆盖有薄膜的沟槽中制造的空心反谐振反射光波导（ARROWs）的设计、制造和特性。这些结构是在硅片上使用标准微加工技术（包括等离子体蚀刻）构建而成，以形成沟槽。展示了四种波导设计，它们具有不同数量的薄膜反射层。我们证明，随着反射层的增加，光损耗会降低，测量得到的损耗系数低至1厘米⁻¹ 。 （注：原文中“1 cm”表述有误，结合语境推测应为“1 cm⁻¹”，已在译文中修正）
