Chen Yung-I, Ou Tzu-Yu, Chang Li-Chun, Liao Yan-Zhi
Department of Optoelectronics and Materials Technology, National Taiwan Ocean University, Keelung 202301, Taiwan.
Department of Materials Engineering, Ming Chi University of Technology, New Taipei 243303, Taiwan.
Materials (Basel). 2025 Aug 5;18(15):3672. doi: 10.3390/ma18153672.
Mixing enthalpy (Δ), mixing entropy (Δ), atomic-size difference (δ), and valence electron concentration (VEC) are the indicators determining the phase structures of multi-principal element alloys. Exploring the relationships between the structures and properties of multi-principal element films is a fundamental study. TiZrHf films with a Δ of 0.00 kJ/mol, Δ of 9.11 J/mol·K (1.10R), of 3.79%, and VEC of 4.00 formed a hexagonal close-packed (HCP) solid solution. Exploring the characterization of TiZrHf films after solving Ta, Y, and Cr atoms with distinct atomic radii is crucial for realizing multi-principal element alloys. This study fabricated TiZrHf, TiZrHfTa, TiZrHfY, and TiZrHfCr films through co-sputtering. The results indicated that TiZrHfTa films formed a single body-centered cubic (BCC) solid solution. In contrast, TiZrHfY films formed a single HCP solid solution, and TiZrHfCr films formed a nanocrystalline BCC solid solution. The crystallization of TiZrHf(Ta, Y, Cr) films and the four indicators mentioned above for multi-principal element alloy structures were correlated. The mechanical properties and thermal stability of the TiZrHf(Ta, Y, Cr) films were investigated.
混合焓（Δ）、混合熵（Δ）、原子尺寸差（δ）和价电子浓度（VEC）是决定多主元合金相结构的指标。探索多主元薄膜的结构与性能之间的关系是一项基础研究。Δ为0.00 kJ/mol、Δ为9.11 J/mol·K（1.10R）、δ为3.79%且VEC为4.00的TiZrHf薄膜形成了六方密排（HCP）固溶体。探索在溶解具有不同原子半径的Ta、Y和Cr原子后TiZrHf薄膜的特性对于实现多主元合金至关重要。本研究通过共溅射制备了TiZrHf、TiZrHfTa、TiZrHfY和TiZrHfCr薄膜。结果表明，TiZrHfTa薄膜形成了单一的体心立方（BCC）固溶体。相比之下，TiZrHfY薄膜形成了单一的HCP固溶体，而TiZrHfCr薄膜形成了纳米晶BCC固溶体。TiZrHf（Ta，Y，Cr）薄膜的结晶与上述多主元合金结构的四个指标相关。研究了TiZrHf（Ta，Y，Cr）薄膜的力学性能和热稳定性。
