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近红外(NIR)芯片上气体泛音光谱的品质因数

Figure of Merit for Gas Overtone Spectroscopy on a Chip in Near-Infrared (NIR).

作者信息

Sheintop Uzziel, Karabchevsky Alina

机构信息

School of Electrical and Computer Engineering, Ben-Gurion University of the Negev, Beer-Sheva 8410501, Israel.

出版信息

Sensors (Basel). 2025 Aug 16;25(16):5092. doi: 10.3390/s25165092.

DOI:10.3390/s25165092
PMID:40871955
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12389844/
Abstract

The development of compact, CMOS-compatible gas sensors is critical for advancing real-time environmental monitoring and industrial diagnostics. In this study, we present a detailed numerical investigation of integrated photonic waveguide designs-such as ridge and slot-optimized for overtone-based gas spectroscopy in the near-infrared range. By evaluating both the evanescent-field confinement and curvature-induced losses across multiple silicon-on-insulator platforms, we identify optimal geometries that maximize light-analyte interactions while minimizing bending attenuation. Our findings provide essential design guidelines for high-performance, low-footprint gas sensors.

摘要

开发紧凑的、与CMOS兼容的气体传感器对于推进实时环境监测和工业诊断至关重要。在本研究中,我们对集成光子波导设计(如脊形和狭缝形)进行了详细的数值研究,这些设计针对近红外范围内基于泛音的气体光谱进行了优化。通过评估多个绝缘体上硅平台上的倏逝场限制和曲率引起的损耗,我们确定了最佳几何结构,可在使弯曲衰减最小化的同时最大化光与分析物的相互作用。我们的研究结果为高性能、小尺寸气体传感器提供了重要的设计指导。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/d68a6815b780/sensors-25-05092-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/d9164cb57310/sensors-25-05092-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/2a7f5edf903c/sensors-25-05092-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/f51d565431fd/sensors-25-05092-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/38365bb8676d/sensors-25-05092-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/fec6b7c42a50/sensors-25-05092-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/4f8f2ba094c1/sensors-25-05092-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/d68a6815b780/sensors-25-05092-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/d9164cb57310/sensors-25-05092-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/2a7f5edf903c/sensors-25-05092-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/f51d565431fd/sensors-25-05092-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/38365bb8676d/sensors-25-05092-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/fec6b7c42a50/sensors-25-05092-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/4f8f2ba094c1/sensors-25-05092-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f933/12389844/d68a6815b780/sensors-25-05092-g007.jpg

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本文引用的文献

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ACS Photonics. 2023 Nov 21;10(12):4282-4289. doi: 10.1021/acsphotonics.3c01085. eCollection 2023 Dec 20.
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Larger-Than-Unity External Optical Field Confinement Enabled by Metamaterial-Assisted Comb Waveguide for Ultrasensitive Long-Wave Infrared Gas Spectroscopy.
超材料辅助梳状波导实现的超大光外场约束用于超高灵敏长波红外气体光谱学。
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Sensors (Basel). 2021 Apr 3;21(7):2513. doi: 10.3390/s21072513.
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