Lee Gyeongho, Ko Raksan, Kang Seungme, Kim Yeong Jae, Kim Young-Joon, Yoo Hocheon
Semiconductor Total Solution Center, Korea Institute of Ceramic Engineering and Technology, 3321 Gyeongchung-daero, Icheon 17303, Republic of Korea.
Department of Materials Science and Engineering, Korea University, 145 Anam-ro, Seoul 02841, Republic of Korea.
Micromachines (Basel). 2025 Jul 27;16(8):865. doi: 10.3390/mi16080865.
Oblique angle deposition (OAD) holds significant potential for diverse applications, including energy harvesting devices, optoelectronic sensors, and electronic devices, owing to the creation of unique nanostructures. These nanostructures are characterized by their porosity and nanoscale columns, which can exist in numerous forms depending on deposition conditions. As a result, the engineering of nanostructures using OAD achieves the successful modulation of optical properties such as absorption, reflection, and transmission. This explains the current surge of attention toward photodetectors based on OAD technology. This review presents various photodetectors based on OAD technology and summarizes reported cases. It also explores current advancements, major applications, and future directions in photodetector development and nanostructure engineering. Ultimately, this review aims to provide a comprehensive overview of the research trends in photodetectors utilizing OAD technology and focus on their further development and application potential.
由于独特纳米结构的形成，倾斜角沉积（OAD）在包括能量收集装置、光电传感器和电子设备等多种应用中具有巨大潜力。这些纳米结构的特点是具有孔隙率和纳米级柱体，根据沉积条件的不同可以呈现多种形式。因此，利用OAD对纳米结构进行工程设计成功地实现了对诸如吸收、反射和透射等光学特性的调制。这就解释了当前基于OAD技术的光电探测器为何备受关注。本综述介绍了基于OAD技术的各种光电探测器并总结了已报道的案例。它还探讨了光电探测器开发和纳米结构工程的当前进展、主要应用及未来方向。最终，本综述旨在全面概述利用OAD技术的光电探测器的研究趋势，并关注其进一步发展和应用潜力。
