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在碲化钼上进行二氧化钛的原子层沉积:化学变化、能带偏移和光物理性质

Atomic Layer Deposition of TiO on MoTe: Chemical Changes, Band Offsets, and Photophysics.

作者信息

Theiner Thomas F, Garland Ben M, Hamburger Robert, Hynek David J, Önder Elifnaz, Cha Judy J, Young Elizabeth R, Strandwitz Nicholas C

机构信息

Department of Materials Science and Engineering, Institute for Functional Materials and Devices, Lehigh University, Bethlehem, Pennsylvania 18015, United States.

Department of Chemistry, Lehigh University, Bethlehem, Pennsylvania 18015, United States.

出版信息

ACS Appl Electron Mater. 2025 Aug 25;7(17):8045-8052. doi: 10.1021/acsaelm.5c00885. eCollection 2025 Sep 9.

DOI:10.1021/acsaelm.5c00885
PMID:40949596
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12424187/
Abstract

Transition metal dichalcogenides (TMDCs) are well suited to optoelectronic applications due to their strong absorption of a broad spectrum of wavelengths and their layered structure, which permits the assembly of van der Waals heterostructures. The behavior of TMDC-TMO (transition metal oxide) interfaces is an important topic for the potential development of TMDC-based optoelectronics, as they may be effective either as active components of optoelectronic devices or as interlayers between TMDCs and metals, improving contact efficiencies. Here, TiO-MoTe junctions were studied to determine the effectiveness of TiO synthesized with atomic layer deposition (ALD) as a potential charge-separating layer for MoTe. Band alignments measured with X-ray photoelectron spectroscopy (XPS) suggested a driving force for carrier separation. However, transient absorption spectroscopy (TAS) showed no evidence of charge injection, with relaxation mechanisms and lifetimes changing minimally after the deposition of TiO. High exciton binding energies are proposed as a likely cause of this behavior. XPS was also used to analyze the interface chemistry of the heterojunctions, revealing the formation of a thin MoO layer on bare MoTe samples, which was partially reduced during the process of TiO deposition. This work provides important information about chemical changes and the resulting electronic behavior of interfaces between two-dimensional (2D) and three-dimensional (3D) solids.

摘要

过渡金属二硫属化物(TMDCs)由于其对宽光谱波长的强烈吸收以及其层状结构,非常适合用于光电子应用,这种层状结构允许组装范德华异质结构。TMDC-TMO(过渡金属氧化物)界面的行为是基于TMDC的光电子学潜在发展的一个重要课题,因为它们既可以作为光电器件的有源组件,也可以作为TMDC与金属之间的中间层,提高接触效率。在这里,研究了TiO-MoTe结,以确定用原子层沉积(ALD)合成的TiO作为MoTe潜在电荷分离层的有效性。用X射线光电子能谱(XPS)测量的能带排列表明了载流子分离的驱动力。然而,瞬态吸收光谱(TAS)没有显示电荷注入的证据,在TiO沉积后,弛豫机制和寿命变化很小。高激子结合能被认为是这种行为的一个可能原因。XPS还用于分析异质结的界面化学,揭示在裸MoTe样品上形成了一层薄的MoO层,该层在TiO沉积过程中部分被还原。这项工作提供了关于二维(2D)和三维(3D)固体之间界面的化学变化及其产生的电子行为的重要信息。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/002ce21318b3/el5c00885_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/b19ecbab47a8/el5c00885_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/884dbc2a645f/el5c00885_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/2c0ececcc105/el5c00885_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/7981716bab1c/el5c00885_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/002ce21318b3/el5c00885_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/b19ecbab47a8/el5c00885_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/884dbc2a645f/el5c00885_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/2c0ececcc105/el5c00885_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/7981716bab1c/el5c00885_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2eb1/12424187/002ce21318b3/el5c00885_0005.jpg

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