微纳制造与微传感器

Microfabrication and microsensors.

作者信息

Shoji S, Esashi M

机构信息

Department of Mechatronics & Precision Engineering, Tohoku University, Sendai, Japan.

出版信息

Appl Biochem Biotechnol. 1993 Apr-May;41(1-2):21-34. doi: 10.1007/BF02918525.

DOI:10.1007/BF02918525

PMID:8215338

Abstract

In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as microvalve and a micropump for integrated chemical analysis systems, are also described.

摘要

为了制造微传感器，已采用基于大规模集成电路技术的微机械加工、微制造技术。本文描述了有用的微机械加工技术。介绍了集成微传感器的实例，如包括读出电路的压力传感器和用于血气分析的多传感器单元。还描述了用于集成化学分析系统的微流量控制装置，如微阀和微泵。