Ren SX, Kenik EA, Alexander KB, Goyal A
Metals and Ceramics Division, Oak Ridge National Laboratory, Building 5500, MS 6376, P.O. Box 2008, Oak Ridge, TN 37831-6376
Microsc Microanal. 1998 Jan;4(1):15-22. doi: 10.1017/s1431927698980011.
A Monte Carlo model was used to simulate specimen-electron beam interactions relevant to electron back-scattered diffraction (EBSD). Electron trajectories were calculated for a variety of likely experimental conditions to examine the interaction volume of the incident electrons as well as that of the subset of incident electrons that emerge from the specimen, i.e., back-scattered electrons (BSEs). The spatial resolution of EBSD was investigated as functions of both materials properties, such as atomic number, atomic weight, and density, and experimental parameters, such as specimen thickness, tilt, and incident beam accelerating voltage. These simulations reveal that the achievable spatial resolution in EBSD is determined by these intrinsic and extrinsic parameters.
使用蒙特卡罗模型来模拟与电子背散射衍射（EBSD）相关的样品 - 电子束相互作用。针对各种可能的实验条件计算电子轨迹，以研究入射电子的相互作用体积以及从样品中出射的入射电子子集，即背散射电子（BSE）的相互作用体积。研究了EBSD的空间分辨率与材料特性（如原子序数、原子量和密度）以及实验参数（如样品厚度、倾斜度和入射束加速电压）的函数关系。这些模拟表明，EBSD中可实现的空间分辨率由这些内在和外在参数决定。
