Technique for preparing cross-section transmission electron microscope specimens from ion-irradiated ceramics.

The general techniques necessary to produce a high-quality cross-sectioned ceramic specimen for transmission electron microscope observation are outlined. A particularly important point is that the width of the glued region between faces of the ceramic specimen must be less than 0.2 micron to prevent loss of the near-surface region during ion milling. A recently developed vise for gluing ceramic cross-section specimens is described, and some examples of the effect of glue thickness on specimen quality are shown.