Fauver M E, Dunaway D L, Lilienfeld D H, Craighead H G, Pollack G H
Department of Bioengineering, University of Washington, Seattle 98195-7962, USA.
IEEE Trans Biomed Eng. 1998 Jul;45(7):891-8. doi: 10.1109/10.686797.
We present two new microfabricated cantilever-beam force transducers. The transducers were fabricated from thin silicon-nitride films, and were used respectively to measure forces generated by two small-muscle preparations: the single myofibril, and the single actin filament in contact with a myosin-coated surface. A simple resonance method was developed to characterize the transducers. Because of the high reproducibility of lever dimensions and the consistency of the modulus of elasticity, few calibration measurements sufficed to characterize the stiffness of all the levers on a single wafer.
我们展示了两种新型的微加工悬臂梁式力传感器。这些传感器由氮化硅薄膜制成，分别用于测量两种小肌肉制剂产生的力：单个肌原纤维以及与肌球蛋白包被表面接触的单个肌动蛋白丝。我们开发了一种简单的共振方法来表征这些传感器。由于杠杆尺寸的高重现性以及弹性模量的一致性，只需进行少量校准测量就足以表征单个晶圆上所有杠杆的刚度。
