Wu Zhiyong, Xanthopoulos Nicolas, Reymond Frédéric, Rossier Joël S, Girault Hubert H
Laboratoire d'Electrochimie, Département de Chimie, Ecole Polytechnique Fédérale de Lausanne, Lausanne, Switzerland.
Electrophoresis. 2002 Mar;23(5):782-90. doi: 10.1002/1522-2683(200203)23:5<782::AID-ELPS782>3.0.CO;2-K.
This paper presents a fabrication of polymer microchips with homogeneous material technique due to surface treatment by plasma before sealing. UV laser photoablation was used for fast prototyping of microstructures, and oxygen plasma was used as a surface treatment for both the microfabricated substrate and the polymer cover. It was found that with an oxidative plasma treatment, successful bonding could be achieved without adhesive material between polymer sheets substantially below the glass transition temperature of the polymer. Homogeneous polyethylene terephthalate (PET) microstructures were characterized by scanning electron microscopy (SEM) and analyzed by X-ray photoelectron spectroscopy (XPS) surface analyses after different surface treatments. The electroosmotic flow characteristics including the velocity and the stability over 20 days have been tested and compared to composite channels, in which the cover presents a polyethylene (PE) adhesive layer. Capillary zone electrophoresis in both homogeneous and composite microanalytical devices were then performed and compared in order to evaluate the separation efficiency. In preliminary experiments, a plate height of 0.6 microm has been obtained with homogenous microchannels. The surface analysis pointed out that the surface chemistry is of prime importance for the performance of microfluidic separation.
本文介绍了一种聚合物微芯片的制造方法，该方法采用均质材料技术，在密封前通过等离子体进行表面处理。紫外激光光烧蚀用于微结构的快速原型制作，氧等离子体用作微加工基板和聚合物盖的表面处理。研究发现，通过氧化等离子体处理，在聚合物玻璃化转变温度以下，聚合物片材之间无需粘合剂材料即可实现成功键合。通过扫描电子显微镜（SEM）对均质聚对苯二甲酸乙二酯（PET）微结构进行表征，并在不同表面处理后通过X射线光电子能谱（XPS）表面分析进行分析。测试了包括速度和20天稳定性在内的电渗流特性，并与复合通道进行了比较，其中盖层具有聚乙烯（PE）粘合剂层。然后在均质和复合微分析装置中进行毛细管区带电泳并进行比较，以评估分离效率。在初步实验中，均质微通道的板高为0.6微米。表面分析指出，表面化学对于微流体分离的性能至关重要。
