Egerton R F
Faculty of Science, University of Alberta, Edmonton, Alta. T6G 2J1, Canada.
Micron. 2003;34(3-5):127-39. doi: 10.1016/s0968-4328(03)00023-4.
This article is a survey of hardware and software advances that promise to increase the power and sensitivity of electron energy-loss spectroscopy (EELS) and energy-filtered imaging (EFTEM) in a transmission electron microscope. Recent developments include electron-gun monochromators, lens-aberration correctors, and software for spectral sharpening, spectral processing and interpretation of fine structure. Future improvements could include the deployment of new electron sources. The expected enhancements in energy and spatial resolution are compared with fundamental limitations that arise from the natural widths of spectral peaks, the delocalization of inelastic scattering and the problem of electron-irradiation damage.
本文综述了硬件和软件方面的进展，这些进展有望提高透射电子显微镜中电子能量损失谱（EELS）和能量过滤成像（EFTEM）的功能和灵敏度。近期的发展包括电子枪单色仪、透镜像差校正器以及用于光谱锐化、光谱处理和精细结构解释的软件。未来的改进可能包括部署新的电子源。将预期的能量和空间分辨率增强与由光谱峰的自然宽度、非弹性散射的离域化以及电子辐照损伤问题所导致的基本限制进行了比较。
