Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden.
Sci Rep. 2017 Mar 14;7:44390. doi: 10.1038/srep44390.
The spinodal decomposition and thermal stability of thin InAlN layers and InAlN/AlN superlattices with AlN(0001) templates on AlO(0001) substrates was investigated by in-situ heating up to 900 °C. The thermally activated structural and chemical evolution was investigated in both plan-view and cross-sectional geometries by scanning transmission electron microscopy in combination with valence electron energy loss spectroscopy. The plan-view observations demonstrate evidence for spinodal decomposition of metastable InAlN after heating at 600 °C for 1 h. During heating compositional modulations in the range of 2-3 nm-size domains are formed, which coarsen with applied thermal budgets. Cross-sectional observations reveal that spinodal decomposition begin at interfaces and column boundaries, indicating that the spinodal decomposition has a surface-directed component.
采用原位加热至 900°C 的方法研究了 AlO(0001) 衬底上的 AlN(0001) 模板的薄 InAlN 层和 InAlN/AlN 超晶格的旋节分解和热稳定性。通过扫描透射电子显微镜结合价电子能量损失光谱，在平面和横截面几何结构中研究了热激活的结构和化学演化。平面观察结果表明，在 600°C 加热 1 小时后，亚稳态 InAlN 发生旋节分解。在加热过程中，在 2-3nm 大小的畴范围内形成了组成调制，这些调制随着施加的热预算而粗化。横截面观察表明，旋节分解始于界面和柱状边界，表明旋节分解具有面向表面的分量。
