Chen Zhifeng, Gao Yunhua, Su Rongguo, Li Chengwu, Lin Jinming
Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.
Electrophoresis. 2003 Sep;24(18):3246-52. doi: 10.1002/elps.200305534.
A stainless steel template for the fabrication of plastic microfluidic devices has been developed by photolithography and chemical etching technique. The preparation process of the template is simple, rapid, and low-cost. The cross sectional profiles of raised microchannels on the template are trapezoidal. The surface roughness of the templates was controlled down to 190 nm. The template can be used repeatedly to generate devices reproducibly. The microfluidic devices of poly(methyl methacrylate) (PMMA) were fabricated by in situ polymerization using the templates. The reproducibility of the fabricated microchannel is high and the relative standard deviation is 0.7% by the in situ polymerization approach. Some physical properties of the polymerized microchannels were characterized including the transparency, the thermal deformation temperature, and the dimensional information. Current monitoring was used to evaluate the electroosmotic flow within the microchannels under the electric field strength of 300 V/cm.
通过光刻和化学蚀刻技术开发了一种用于制造塑料微流控器件的不锈钢模板。该模板的制备过程简单、快速且成本低。模板上凸起微通道的横截面轮廓为梯形。模板的表面粗糙度控制在190纳米以下。该模板可重复使用以可重复地制造器件。使用该模板通过原位聚合制备了聚甲基丙烯酸甲酯（PMMA）微流控器件。通过原位聚合方法制备的微通道的重现性高，相对标准偏差为0.7%。对聚合微通道的一些物理性质进行了表征，包括透明度、热变形温度和尺寸信息。在300 V/cm的电场强度下，使用电流监测来评估微通道内的电渗流。
