Kamizuma Hiroshi, Omori Tatsuya, Hashimoto Ken-Ya, Yamaguchi Masatsune
Graduate School of Science and Technology, Chiba University, Chiba-shi 263-8522, Japan.
IEEE Trans Ultrason Ferroelectr Freq Control. 2006 Jun;53(6):1186-91. doi: 10.1109/tuffc.2006.1642517.
This paper describes the development of a high-speed laser probe system for surface acoustic wave (SAW) devices. A fast scanning rate of 2.5 kS/s is realized by continuous stage translation and successive acquisition of the detector output by a high-speed data-logger. Trigger pulses are generated from the output of a high-precision linear-scale installed in the translation stage and fed to the data-logger for the synchronization with the stage movement. The phase-sensitive, knife-edge method is used for the optical detection. This makes the system very unsusceptible to low-frequency mechanical vibration caused by the fast stage translation. The system is applied for the characterization of spurious resonance modes in SAW devices. In conjunction with skillful use of image processing in wavenumber domain, it is shown how the present system is effective in the diagnosis and development of SAW devices.
本文描述了一种用于表面声波（SAW）器件的高速激光探针系统的开发。通过连续的平台平移以及高速数据记录器对探测器输出的连续采集，实现了2.5 kS/s的快速扫描速率。触发脉冲由安装在平移平台上的高精度线性标尺的输出产生，并馈送到数据记录器，以便与平台移动同步。采用相敏刀口法进行光学检测。这使得该系统对快速平台平移引起的低频机械振动非常不敏感。该系统用于表征SAW器件中的杂散共振模式。结合波数域图像处理的巧妙运用，展示了本系统在SAW器件诊断和开发中的有效性。
