Mantel Klaus, Lamprecht Jürgen, Lindlein Norbert, Schwider Johannes
Institute of Optics, Information and Photonics (Max-Planck Research Group), Friedich-Alexander-Universität Erlangen-Nürnberg, Germany.
Appl Opt. 2006 Nov 1;45(31):8013-8. doi: 10.1364/ao.45.008013.
Cylindrical specimens may be tested advantageously by using grazing-incidence interferometry. A multiple positions test in combination with rotational averaging has recently been used to separate the surface deviations of the specimen from the interferometric aberrations. To reduce the measuring time and to check whether the results are reliable, a second procedure is now investigated, which uses the principle of the multiple positions test to determine quantities proportional to the difference quotients of the surface deviations. After numerical integration, the results can be compared with those obtained previously by rotational averaging. The measurement principle is described, and calibration results are presented.
通过使用掠入射干涉测量法可以对圆柱形试样进行有利的测试。最近，结合旋转平均的多位置测试已被用于将试样的表面偏差与干涉像差区分开来。为了减少测量时间并检查结果是否可靠，现在研究了第二种方法，该方法利用多位置测试原理来确定与表面偏差的差商成比例的量。经过数值积分后，结果可与之前通过旋转平均获得的结果进行比较。描述了测量原理并给出了校准结果。
