Sato Hirotaka, Homma Takayuki
Department of Applied Chemistry, Waseda University, Okubo, Shinjuku, Tokyo 169-8555, Japan.
J Nanosci Nanotechnol. 2007 Jan;7(1):225-31.
Fabrication processes of arrayed magnetic nanodots for the use of patterned magnetic recording media were reviewed. One candidate for the patterned media is ordered assemble of magnetic nanoparticles, and the other is patterned magnetic thin films fabricated using various micro/nano scale machining processes. For the formation of patterned masks and molds, lithography processes as well as self-organized pattern formation are utilized. For the deposition processes of magnetic dots, electrochemical deposition processes were widely used. These fabrication processes are reviewed mainly from recent reports. The recording systems for the patterned media including probe-type-recording are also overviewed.
综述了用于图案化磁记录介质的阵列磁性纳米点的制造工艺。图案化介质的一个候选方案是磁性纳米颗粒的有序组装,另一个是使用各种微/纳米尺度加工工艺制造的图案化磁性薄膜。对于图案化掩模和模具的形成,利用了光刻工艺以及自组织图案形成。对于磁点的沉积工艺,广泛使用了电化学沉积工艺。这些制造工艺主要根据最近的报告进行综述。还概述了包括探针型记录在内的图案化介质的记录系统。