Tseng Ampere A, Li Zhuang
Department of Mechanical and Aerospace Engineering, Arizona State University, Tempe, Arizona 85287-6106, USA.
J Nanosci Nanotechnol. 2007 Aug;7(8):2582-95. doi: 10.1166/jnn.2007.624.
Scanning probe microscopy (SPM), including scanning tunneling microscopy (STM) and atomic force microscopy (AFM), has become a powerful tool in building nanoscale structures required by modern industry. In this article, the use of SPM for the manipulation of atoms and molecules for patterning nanostructures for opt-electronic and biomedical applications is reviewed. The principles and procedures of manipulation using STM and AFM-based technologies are presented with an emphasis on their ability to create a wide variety of nanostructures for different applications. The interaction among the atoms/molecules, surface, and tip are discussed. The approaches for positioning the atom/molecule from and to the desired locations and for precisely controlling its movement are elaborated for each specific manipulation technique. As an AFM-based technique, the dip-pen nanolithography is also included. Finally, concluding remarks on technological improvement and future research is provided.
扫描探针显微镜(SPM),包括扫描隧道显微镜(STM)和原子力显微镜(AFM),已成为构建现代工业所需纳米级结构的强大工具。本文综述了利用扫描探针显微镜对原子和分子进行操纵,以制备用于光电和生物医学应用的纳米结构图案。介绍了基于扫描隧道显微镜和原子力显微镜技术的操纵原理和步骤,重点强调了它们为不同应用创建各种纳米结构的能力。讨论了原子/分子、表面和探针之间的相互作用。针对每种特定的操纵技术,详细阐述了将原子/分子定位到所需位置以及精确控制其移动的方法。作为一种基于原子力显微镜的技术,蘸笔纳米光刻也被涵盖在内。最后,给出了关于技术改进和未来研究的总结性评论。