Liang Xiaogan, Morton Keith J, Austin Robert H, Chou Stephen Y
Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA.
Nano Lett. 2007 Dec;7(12):3774-80. doi: 10.1021/nl072253x. Epub 2007 Nov 1.
We report and demonstrate a new method to fabricate single fluidic-channels of uniform channel width (11-50 nm) and over 1.5 cm in length, which are essential to developing innovative bio/chemical sensors but have not been fabricated previously. The method uses unconventional nanofabrication (a combination of crystallographic anisotropic etching, conformal coating, and edge patterning, etc.) to create an imprint mold of a channel pattern and nanoimprint to duplicate such channel. The centimeter-long channel continuity is verified by flowing fluorescent dye-stained water and stretching and transporting DNAs. The 18 by 20 nm channel cross-section was confirmed by measuring the liquid conductance in the channel.
我们报告并展示了一种制造具有均匀通道宽度（11 - 50纳米）且长度超过1.5厘米的单流体通道的新方法，这对于开发创新型生物/化学传感器至关重要，但此前尚未制造出来。该方法采用非常规纳米制造技术（晶体各向异性蚀刻、保形涂层和边缘图案化等相结合）来创建通道图案的压印模具，并通过纳米压印来复制此类通道。通过流动荧光染料染色的水以及拉伸和运输DNA来验证厘米级长通道的连续性。通过测量通道中的液体电导率确认了18×20纳米的通道横截面。
