Cuche E, Bevilacqua F, Depeursinge C
Opt Lett. 1999 Mar 1;24(5):291-3. doi: 10.1364/ol.24.000291.
We present a new application of digital holography for phase-contrast imaging and optical metrology. This holographic imaging technique uses a CCD camera for recording of a digital Fresnel off-axis hologram and a numerical method for hologram reconstruction. The method simultaneously provides an amplitude-contrast image and a quantitative phase-contrast image. An application to surface profilometry is presented and shows excellent agreement with contact-stylus probe measurements.
我们展示了数字全息术在相衬成像和光学计量学方面的一种新应用。这种全息成像技术使用电荷耦合器件(CCD)相机记录数字菲涅耳离轴全息图,并采用数值方法进行全息图重建。该方法同时提供幅度对比度图像和定量相衬图像。文中给出了其在表面轮廓测量中的应用,结果表明与接触式触针探头测量结果具有极好的一致性。