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高Q值压电谐振器材料与器件的进展

Advances in high-Q piezoelectric resonator materials and devices.

作者信息

Ballato A, Gualtieri J G

机构信息

US Army Res. Lab. Electron. and Power Sources Directorate, Fort Monmouth, NJ.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 1994;41(6):834-44. doi: 10.1109/58.330264.

Abstract

In order to compare piezoelectric materials and devices, an intrinsic parameter, the motional time constant tau(1)/sup (m/)=(omega/sub m/Q/sub m/)(-1) for a particular mode m is employed. The use of tau(1)/sup (m/) follows from the accommodation of acoustic loss in the elastic compliance/stiffness and the establishment of material coefficients that are elements of viscosity matrices. Alternative and fully equivalent definitions of tau(1) are given based on the RC time constant derived from the equivalent circuit representation of a crystal resonator, acoustic attenuation, logarithmic decrement, and viscosity or damping. For quartz devices, the variation of tau(1): for any simple thickness mode, for the Y'X shear mode for rotated Y-cuts, and with diameter-thickness ratio for AT-cuts is discussed. Other factors such as mounting loss and loss caused by crystal inhomogeneities (dislocations, defect positions in the resonator, and impurity migration under vibrational stress) are briefly considered with quartz devices as the model. Some new piezoelectric materials/material constants/devices are reviewed and their motional time constants are compared. A physical parameter, composed of acoustic velocity, piezoelectric coupling, and tau(1) is identified which aids in understanding the maximum frequency limitations of plate resonators.

摘要

为了比较压电材料和器件,采用了一个本征参数,即特定模式(m)下的运动时间常数(\tau_{1}^{(m)} = (\omega_{m}Q_{m})^{-1})。使用(\tau_{1}^{(m)})是由于在弹性柔顺性/刚度中考虑了声损耗,并建立了作为粘性矩阵元素的材料系数。基于从晶体谐振器的等效电路表示、声衰减、对数减量以及粘性或阻尼导出的(RC)时间常数,给出了(\tau_{1})的替代且完全等效的定义。对于石英器件,讨论了(\tau_{1})对于任何简单厚度模式、旋转(Y)切的(Y'X)剪切模式以及(AT)切的直径 - 厚度比的变化。以石英器件为模型,简要考虑了其他因素,如安装损耗以及由晶体不均匀性(位错、谐振器中的缺陷位置以及振动应力下的杂质迁移)引起的损耗。综述了一些新型压电材料/材料常数/器件,并比较了它们的运动时间常数。确定了一个由声速、压电耦合和(\tau_{1})组成的物理参数,这有助于理解平板谐振器的最大频率限制。

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