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钛酸铅薄膜应力效应的拉曼光谱和X射线衍射研究。

Raman spectroscopy and X-ray diffraction studies of stress effects in PbTiO3 thin films.

作者信息

Bartasyte Ausrine, Chaix-Pluchery Odette, Kreisel Jens, Santiso José, Margueron Samuel, Boudard Michel, Jiménez Carmen, Abrutis Adulfas, Weiss François

机构信息

Laboratoire des Matériaux et du Génie Physique (CNRS-INP Grenoble-Minatec), France.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Dec;54(12):2623-31. doi: 10.1109/TUFFC.2007.589.

Abstract

A systematic study of domain structure and residual stress evolution with film thickness and of phase transition in c/a epitaxial PbTiO(3)/LaAlO(3) films using X-ray diffraction and Raman spectroscopy is reported. Both techniques revealed that the films are under tensile residual stress in the film plane and that a-domains are more stressed than c-domains. The two components of the large A(1)(TO) Ramanmodes are associated with a- and c-domains and their intensity ratio correlates to the volume fraction of a-domains. The evolution of the Raman signature with temperature revealed that the spectrum of a-domains disappears around 480 degrees C, whereas c-domains present an anomaly in their spectrum at 500 degrees C but maintain a well-defined Raman signature up to 600 degrees C.

摘要

报道了一项利用X射线衍射和拉曼光谱对c/a外延PbTiO(3)/LaAlO(3)薄膜的畴结构、残余应力随膜厚的演变以及相变进行的系统研究。两种技术均表明,薄膜在膜平面内承受拉伸残余应力,且a畴比c畴承受的应力更大。大A(1)(TO)拉曼模式的两个分量与a畴和c畴相关,其强度比与a畴的体积分数相关。拉曼特征随温度的演变表明,a畴的光谱在约480℃时消失,而c畴在500℃时其光谱出现异常,但在高达600℃时仍保持明确的拉曼特征。

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