Bhuvana T, Kulkarni G U
Chemistry and Physics of Materials Unit and DST Unit on Nanoscience, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur PO, Bangalore 560 064, India.
ACS Nano. 2008 Mar;2(3):457-62. doi: 10.1021/nn700372h.
Palladium hexadecylthiolate is shown to serve as a negative-tone direct-write electron resist to produce nanopatterns down to 30 nm. The written patterns do not deviate much from the precursor in composition, while a post-treatment at 230 degrees C in air produced metallic Pd nanowires with residual carbon less than 10% and resistivity close to the bulk value, a desirable property of interconnects in nanocircuitry. The as-written patterns contain small nanocrystals (<5 nm) in a hydrocarbon matrix, which upon annealing aggregate to form well-connected networks of larger nanocrystals (5-15 nm), thus giving rise to metallic conductivity.
十六烷基硫醇钯被证明可作为一种负性直写电子抗蚀剂，用于制作低至30纳米的纳米图案。所书写的图案在成分上与前驱体偏差不大，而在空气中230摄氏度的后处理产生了残余碳小于10%且电阻率接近体材料值的金属钯纳米线，这是纳米电路中互连所需的特性。书写后的图案在碳氢化合物基质中包含小纳米晶体（<5纳米），退火时这些小纳米晶体聚集形成连接良好的较大纳米晶体（5-15纳米）网络，从而产生金属导电性。
