Department of Materials Science and Engineering, Rutgers University, 607 Taylor Road, Piscataway, New Jersey 08854, USA.
ACS Nano. 2010 Jan 26;4(1):524-8. doi: 10.1021/nn901496p.
The deposition of atomically thin highly uniform chemically derived graphene (CDG) films on 300 mm SiO(2)/Si wafers is reported. We demonstrate that the very thin films can be lifted off to form uniform membranes that can be free-standing or transferred onto any substrate. Detailed maps of thickness using Raman spectroscopy and atomic force microscopy height profiles reveal that the film thickness is very uniform and highly controllable, ranging from 1-2 layers up to 30 layers. After reduction using a variety of methods, the CDG films are transparent and electrically active with FET devices yielding high mobilities of approximately 15 cm(2)/(V s) and sheet resistance of approximately 1 kOmega/sq at approximately 70% transparency.
报道了原子级薄的高度均匀的化学衍生石墨烯（CDG）薄膜在 300mm SiO2/Si 晶圆上的沉积。我们证明，这些非常薄的薄膜可以被剥离形成均匀的膜，可以是独立的，也可以转移到任何基底上。使用拉曼光谱和原子力显微镜高度轮廓的详细厚度图表明，薄膜厚度非常均匀且高度可控，范围从 1-2 层到 30 层。经过多种方法还原后，CDG 薄膜是透明的，具有电活性，FET 器件的迁移率约为 15cm2/（V s），约 70%透明度时的方阻约为 1kΩ/sq。
