Pavluch Jirí, Zommer Ludomir, Masek Karel, Skála Tomás, Sutara Frantisek, Nehasil Václav, Pís Igor, Polyak Yaroslav
Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University, Prague 180 00, Czech Republic.
Anal Sci. 2010;26(2):209-15. doi: 10.2116/analsci.26.209.
Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at two incident photoelectron beam angles at energies of 110, 195, 251, 312, 397 and 641 eV. Besides these photon energies, also standard X-ray photoelectron spectroscopy (XPS) was used at a photon energy of 1254 eV. We accumulated Ti 3s, Ti 3p, Ti 3d, V 3s, V 3p, V 3d, Zr 3p, Zr 3d, Zr 4s, Zr 4p, Zr 4d, C 1s, O 1s and O 2s photoelectron peak intensities as functions of the kinetic energies given to them. Under simplifying assumptions, Monte-Carlo calculations of the activated sample concentration profiles were performed to fit the measured spectra intensities. The results proved an in-depth redistribution of the components during the activation process. This way we also contributed to a further development of non-destructive depth profiling by electron spectroscopy techniques.
采用激发能分辨光电子能谱（ERXPS）对非蒸散型Ti-Zr-V三元吸气剂（NEGs）进行了研究。我们尝试对激活过程中NEG成分的深度再分布进行定量研究。样品通过直流磁控溅射在不锈钢基板上非原位制备。ERXPS测量在110、195、251、312、397和641 eV能量下的两个入射光电子束角度进行。除了这些光子能量外，还在1254 eV的光子能量下使用了标准X射线光电子能谱（XPS）。我们积累了Ti 3s、Ti 3p、Ti 3d、V 3s、V 3p、V 3d、Zr 3p、Zr 3d、Zr 4s、Zr 4p、Zr 4d、C 1s、O 1s和O 2s光电子峰强度随给予它们的动能的变化情况。在简化假设下，对激活样品的浓度分布进行了蒙特卡罗计算，以拟合测量的光谱强度。结果证明了激活过程中各成分的深度再分布。通过这种方式，我们也为电子能谱技术的无损深度剖析的进一步发展做出了贡献。
