Department of Materials Science and Engineering, University of California, Los Angeles, California 90095, USA.
Nat Nanotechnol. 2010 Mar;5(3):190-4. doi: 10.1038/nnano.2010.8. Epub 2010 Feb 14.
Graphene has significant potential for application in electronics, but cannot be used for effective field-effect transistors operating at room temperature because it is a semimetal with a zero bandgap. Processing graphene sheets into nanoribbons with widths of less than 10 nm can open up a bandgap that is large enough for room-temperature transistor operation, but nanoribbon devices often have low driving currents or transconductances. Moreover, practical devices and circuits will require the production of dense arrays of ordered nanoribbons, which remains a significant challenge. Here, we report the production of a new graphene nanostructure--which we call a graphene nanomesh--that can open up a bandgap in a large sheet of graphene to create a semiconducting thin film. The nanomeshes are prepared using block copolymer lithography and can have variable periodicities and neck widths as low as 5 nm. Graphene nanomesh field-effect transistors can support currents nearly 100 times greater than individual graphene nanoribbon devices, and the on-off ratio, which is comparable with the values achieved in individual nanoribbon devices, can be tuned by varying the neck width. The block copolymer lithography approach used to make the nanomesh devices is intrinsically scalable and could allow for the rational design and fabrication of graphene-based devices and circuits with standard semiconductor processing.
石墨烯在电子学方面有很大的应用潜力,但由于它是一种零带隙的半导体,不能用于有效的室温场效应晶体管。将石墨烯片加工成宽度小于 10nm 的纳米带,可以打开一个足够大的带隙,用于室温晶体管的工作,但纳米带器件通常具有较低的驱动电流或跨导。此外,实际的器件和电路将需要生产密集排列的有序纳米带,这仍然是一个重大挑战。在这里,我们报告了一种新的石墨烯纳米结构的制备,我们称之为石墨烯纳米网,它可以在一大片石墨烯中打开一个带隙,从而形成一个半导体薄膜。纳米网是通过嵌段共聚物光刻制备的,可以具有可变的周期性和低至 5nm 的颈部宽度。石墨烯纳米网场效应晶体管可以支持近 100 倍于单个石墨烯纳米带器件的电流,并且可以通过改变颈部宽度来调节开关比,其与在单个纳米带器件中实现的值相当。用于制造纳米网器件的嵌段共聚物光刻方法具有内在的可扩展性,可以允许使用标准半导体工艺对基于石墨烯的器件和电路进行合理的设计和制造。