EMPA, Laboratory for Mechanics of Materials and Nanostructures, Thun, Switzerland.
Nanotechnology. 2010 Mar 19;21(11):115503. doi: 10.1088/0957-4484/21/11/115503. Epub 2010 Feb 22.
We investigated the performance of Hall sensors with different Co-C ratios, deposited directly in nanostructured form, using Co(2)(CO)(8) gas molecules, by focused-electron or ion-beam-induced deposition. Due to the enhanced intergrain scattering in these granular wires, the extraordinary Hall effect can be increased by two orders of magnitude with respect to pure Co, up to a magnetic field sensitivity of 1 Omega T(-1). We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than 1 microT Hz(-1/2). For an active area of the sensor of 200 x 200 nm(2), the room temperature magnetic flux resolution is phi(min) = 2 x 10(-5)phi(0) in the thermal noise frequency range, i.e. above 100 kHz.
我们使用 Co(2)(CO)(8)气体分子，通过聚焦电子或离子束诱导沉积，研究了不同 Co-C 比的直接沉积在纳米结构中的 Hall 传感器的性能。由于这些颗粒状导线上的晶粒间散射增强，与纯 Co 相比，非凡的 Hall 效应可以提高两个数量级，达到 1 Omega T(-1)的磁场灵敏度。我们表明，在室温下，最佳磁场分辨率在 Co 比例为 60%至 70%之间获得，优于 1 microT Hz(-1/2)。对于传感器的有效面积为 200 x 200 nm(2)，在室温下，在热噪声频率范围内，磁通量分辨率为 phi(min) = 2 x 10(-5)phi(0)，即高于 100 kHz。
