Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Aichi, Japan.
Nanotechnology. 2010 Mar 26;21(12):125302. doi: 10.1088/0957-4484/21/12/125302. Epub 2010 Mar 2.
We developed out-of-plane, high aspect ratio, nanoscale tip silicon microwire arrays for application to penetrating, multisite, nanoscale biological sensors. Silicon microwire arrays selectively grown by gold-catalyzed vapor-liquid-solid growth of silicon can be formed to create sharpened nanotips with a tip diameter of less than 100 nm by utilizing batch-processed silicon chemical etching for only 1-3 min. The tip angles achieved ranged from 11 degrees to 38 degrees. The nanotip silicon microwires can perform gelatin penetration without wire breakdown, indicating their potential penetrating capability for measurements inside biological tissues.
我们开发了用于穿透、多部位、纳米级生物传感器的平面外、高纵横比、纳米级尖端硅微线阵列。通过利用批处理硅化学蚀刻仅 1-3 分钟，选择性地通过金催化的硅气-液-固生长生长的硅可以形成硅微线阵列，以形成具有小于 100nm 的尖端直径的锐化纳米尖端。实现的尖端角度范围从 11 度到 38 度。纳米尖端硅微线可以在不发生线断裂的情况下进行明胶穿透，表明它们具有穿透生物组织内部进行测量的潜力。
