采用有机硅烷作为前驱体的硅纳米线的气-液-固生长。
Vapor-liquid-solid growth of silicon nanowires using organosilane as precursor.
机构信息
Department of Chemical Engineering, National Tsing Hua University, 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013, ROC.
出版信息
Chem Commun (Camb). 2010 Sep 7;46(33):6105-7. doi: 10.1039/c0cc01454k. Epub 2010 Jul 26.
PMID:20657918
Abstract
Utilizing monophenylsilane as the precursor and liquid injection chemical vapor deposition (LICVD) as the fabrication method offers a novel synthetic approach for the facile, ambient pressure, and continuous vapor-liquid-solid (VLS) synthesis of high quality Si nanowires.
摘要
利用单苯基硅烷作为前驱体和液体注射化学气相沉积（LICVD）作为制备方法，为高质量硅纳米线的简便、常压和连续的气-液-固（VLS）合成提供了一种新的合成方法。
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