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纳米压印光刻技术在功能三维图案中的应用。

Nanoimprint lithography for functional three-dimensional patterns.

机构信息

Department of Chemistry, University of Massachusetts Amherst, 710 North Pleasant Street, Amherst, MA 0100, USA.

出版信息

Adv Mater. 2010 Aug 24;22(32):3608-14. doi: 10.1002/adma.200904396.

Abstract

Nanoimprint lithography (NIL) is viewed as an alternative nanopatterning technique to traditional photolithography, allowing micrometer-scale and sub-hundred-nanometer resolution as well as three-dimensional structure fabrication. In this Research News article we highlight current activities towards the use of NIL in patterning active or functional materials, and the application of NIL in patterning materials that present both chemistry and structure/topography in the patterned structures, which provide scaffolds for subsequent manipulation. We discuss and give examples of the various materials and chemistries that have been used to create functional patterns and their implication in various fields as electronic and magnetic devices, optically relevant structures, biologically important surfaces, and 3D particles.

摘要

纳米压印光刻(NIL)被视为一种替代传统光刻技术的纳米图案化技术,可实现微米级和亚百纳米分辨率以及三维结构制造。在这篇研究新闻文章中,我们重点介绍了目前在使用 NIL 对活性或功能材料进行图案化以及在图案化材料中的应用,这些材料在图案化结构中同时呈现化学和结构/形貌,为后续操作提供了支架。我们讨论并举例说明了各种已被用于创建功能图案的材料和化学物质,及其在电子和磁性器件、与光学相关的结构、生物重要表面和 3D 粒子等各个领域的应用。

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