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通过在粒子光刻的二甲基二氯硅烷层上选择性沉积无电沉积金岛膜实现周期性纳米模板。

Periodic nanotemplating by selective deposition of electroless gold island films on particle-lithographed dimethyldichlorosilane layers.

机构信息

Department of Materials Science and Engineering, 304 CME, University of Utah, Salt Lake City, Utah 84112, USA.

出版信息

ACS Nano. 2010 Jul 27;4(7):4181-9. doi: 10.1021/nn100338f.

DOI:10.1021/nn100338f
PMID:20565129
Abstract

Uniform hexagonal arrays of diverse nanotemplated metal structures were formed via selective electroless gold plating on particle-lithographed dimethyldichlorosilane layers. Surface-associated water at silica bead interstices was shown to correlate with the formation of silane rings with outer ring diameters ranging from 522.5+/-29.7 to 1116.9+/-52.6 nm and/or spherical gold nanoparticles with diameters from 145.5+/-20.2 to 389.1+/-51.1 nm in the array. Reproducibility and millimeter-size scalability of the array were achieved without the need for expensive and sophisticated lithography or metal deposition equipment. The formation of each structure was explained on the basis of the silanization mechanism and microscopic characterization, as well as dimensional analysis of the nanostructures. This new, facile, and versatile method enables fine fabrication of regular metal nanoparticle array platforms to improve optical and plasmonic features in nanoelectronics and nanophotonic devices.

摘要

通过在颗粒光刻的二甲基二氯硅烷层上选择性化学镀金,形成了具有不同纳米模板金属结构的规则六边形阵列。表面相关的水在二氧化硅珠间隙中与形成硅烷环相关联,外圆直径范围从 522.5+/-29.7 到 1116.9+/-52.6nm,并且/或者在阵列中形成直径从 145.5+/-20.2 到 389.1+/-51.1nm 的球形金纳米粒子。无需昂贵和复杂的光刻或金属沉积设备,就实现了该阵列的可重复性和毫米级尺寸的可扩展性。根据硅烷化机制和微观表征以及纳米结构的尺寸分析,解释了每种结构的形成。这种新的、简单的、通用的方法可以精细地制造规则的金属纳米粒子阵列平台,以改善纳米电子学和纳米光子学器件中的光学和等离子体特性。

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