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在 TEM 中校正了球差和色差后的信息传递。

Information transfer in a TEM corrected for spherical and chromatic aberration.

机构信息

Corrected Electron Optical Systems GmbH, Heidelberg, Germany.

出版信息

Microsc Microanal. 2010 Aug;16(4):393-408. doi: 10.1017/S1431927610013498. Epub 2010 Jul 2.

Abstract

For the transmission electron aberration-corrected microscope (TEAM) initiative of five U.S. Department of Energy laboratories in the United States, a correction system for the simultaneous compensation of the primary axial aberrations, the spherical aberration Cs, and the chromatic aberration Cc has been developed and successfully installed. The performance of the resulting Cc /Cs-corrected TEAM instrument has been investigated thoroughly. A significant improvement of the linear contrast transfer can be demonstrated. The information about the instrument one obtains using Young's fringe method is compared for uncorrected, Cs-corrected, and Cc /Cs-corrected instruments. The experimental results agree well with simulations. The conclusions might be useful to others in understanding the process of image formation in a Cc /Cs-corrected transmission electron microscope.

摘要

对于美国五个能源部实验室的透射电子像差校正显微镜(TEAM)计划,已经开发并成功安装了一种校正系统,用于同时补偿主轴向像差、球差 Cs 和色差 Cc。对由此产生的 Cc/Cs 校正 TEAM 仪器的性能进行了彻底的研究。可以证明线性对比度传递的显著改善。使用杨氏条纹法获得的关于仪器的信息对未校正、Cs 校正和 Cc/Cs 校正的仪器进行了比较。实验结果与模拟结果吻合良好。这些结论对于理解 Cc/Cs 校正透射电子显微镜中的成像过程可能对其他人有用。

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