Display and Nanosystem Laboratory, College of Engineering, Korea University, Seoul, Korea.
Nanotechnology. 2010 Nov 26;21(47):475203. doi: 10.1088/0957-4484/21/47/475203. Epub 2010 Oct 29.
The present study demonstrates a flexible gas-diffusion barrier film, containing an SiO(2)/Al(2)O(3) nanolaminate on a plastic substrate. Highly uniform and conformal coatings can be made by alternating the exposure of a flexible polyethersulfone surface to vapors of SiO(2) and Al(2)O(3), at nanoscale thickness cycles via RF-magnetron sputtering deposition. The calcium degradation test indicates that 24 cycles of a 10/10 nm inorganic bilayer, top-coated by UV-cured resin, greatly enhance the barrier performance, with a permeation rate of 3.79 × 10(-5) g m(-2) day(-1) based on the change in the ohmic behavior of the calcium sensor at 20 °C and 50% relative humidity. Also, the permeation rate for 30 cycles of an 8/8 nm inorganic bilayer coated with UV resin was beyond the limited measurable range of the Ca test at 60 °C and 95% relative humidity. It has been found that such laminate films can effectively suppress the void defects of a single inorganic layer, and are significantly less sensitive against moisture permeation. This nanostructure, fabricated by an RF-sputtering process at room temperature, is verified as being useful for highly water-sensitive organic electronics fabricated on plastic substrates.
本研究展示了一种灵活的气体扩散阻挡膜，在塑料基底上包含 SiO(2)/Al(2)O(3) 纳米层。通过射频磁控溅射沉积，在纳米尺度厚度循环中交替暴露于 SiO(2) 和 Al(2)O(3) 的蒸气中，可以制得高度均匀和保形的涂层。钙降解测试表明，24 个周期的 10/10nm 无机双层，顶部涂覆 UV 固化树脂，极大地提高了阻隔性能，在 20°C 和 50%相对湿度下，基于钙传感器欧姆行为的变化，渗透率为 3.79×10(-5)g m(-2)day(-1)。此外，在 60°C 和 95%相对湿度下，用 UV 树脂涂覆的 30 个周期的 8/8nm 无机双层的渗透率超出了 Ca 测试的可测量范围。已经发现，这种层压薄膜可以有效地抑制单层无机层的空隙缺陷，并且对水分渗透的敏感性显著降低。这种通过室温射频溅射工艺制造的纳米结构，被证明对在塑料基底上制造的对水敏感的有机电子器件非常有用。
