Biomicrofluidics. 2010 Sep 27;4(3):36504. doi: 10.1063/1.3491474.
This manuscript describes a convenient method for the fabrication of freestanding, microperforated membranes in photocurable polymers using only one step of photolithography. We used photosensitive prepolymers to make the membranes and photolithography to define the micropatterns. We demonstrated the fabrication of single- and multilayer microperforated membranes in SU-8 photoresist and Norland Optical Adhesive prepolymer. These membranes can be used to pattern surfaces in various materials and to fabricate complex three-dimensional microfluidic channel structures.
本文描述了一种仅通过一步光刻即可在光固化聚合物中制造独立式微孔膜的便捷方法。我们使用光敏预聚物来制造膜，并用光刻来定义微图案。我们展示了在 SU-8 光刻胶和 Norland 光学胶预聚物中制造单层和多层微孔膜的过程。这些膜可用于在各种材料上进行表面图案化，并制造复杂的三维微流控通道结构。
