Department of Chemistry, Indiana University, Bloomington, Indiana 47405, United States.
Langmuir. 2010 Dec 21;26(24):19239-44. doi: 10.1021/la103977e. Epub 2010 Nov 18.
We describe the fabrication and characterization of electromagnetic micropores. These devices consist of a micropore encompassed by a microelectromagnetic trap. Fabrication of the device involves multiple photolithographic steps, combined with deep reactive ion etching and subsequent insulation steps. When immersed in an electrolyte solution, application of a constant potential across the micropore results in an ionic current. Energizing the electromagnetic trap surrounding the micropore produces regions of high magnetic field gradients in the vicinity of the micropore that can direct motion of a ferrofluid onto or off of the micropore. This results in dynamic gating of the ion current through the micropore structure. In this report, we detail fabrication and characterize the electrical and ionic properties of the prepared electromagnetic micropores.
我们描述了电磁微孔的制造和特性。这些器件由一个被微电磁阱包围的微孔组成。器件的制造涉及多个光刻步骤，结合深反应离子刻蚀和后续的绝缘步骤。当浸入电解质溶液中时，在微孔两端施加恒定的电位会导致离子电流。激励微孔周围的电磁阱会在微孔附近产生高磁场梯度区域，从而可以将铁磁流体引导到或离开微孔。这导致通过微孔结构的离子电流的动态门控。在本报告中，我们详细介绍了制备过程，并对制备的电磁微孔的电学和离子特性进行了表征。
