Kharkiv Polytechnic University, Kharkiv, Ukraine.
J Xray Sci Technol. 1995 Jan 1;5(3):295-306. doi: 10.3233/XST-1995-5306.
Annealing effects in the short-period multilayers Cr3C2/C, TiC/C, Cr3C2/(B + C), and CrB2/C were studied in a wide temperature range ~200-1200°C by x-ray scattering and cross-sectional electron microscopy. It was shown that the thermodynamic equilibrium of the layer materials at their interfaces and stabilization of layer structure by impurities and heat treatment are effective approaches to short-period multilayers with enhanced thermal stability of their structure and optical properties.
通过 X 射线散射和横截面电子显微镜研究了 Cr3C2/C、TiC/C、Cr3C2/(B+C) 和 CrB2/C 短周期多层膜在 200-1200°C 宽温度范围内的退火效应。结果表明，界面处层材料的热力学平衡以及杂质和热处理对层结构的稳定作用是提高结构和光学性能热稳定性的短周期多层膜的有效途径。
