Pa P S
Department of Digital Content Design, Graduate School of Toy and Game Design, National Taipei University of Education, Taipei City 106, Taiwan.
J Nanosci Nanotechnol. 2011 Jan;11(1):691-5. doi: 10.1166/jnn.2011.3279.
The low yield of epoxy film and Si3N4 thin-film deposition is an important factor in semiconductor production. A new design system using a set of three lamination-shaped electrodes as a machining tool and micro electro-removal as a precision reclaiming process of the Si3N4 layer and epoxy film removal from silicon wafers of solar cells surface is presented. In the current experiment, the combination of the small thickness of the anode and cathodes corresponds to a higher removal rate for the thin films. The combination of the short length of the anode and cathodes combined with enough electric power produces fast electroremoval. A combination of the small edge radius of the anode and cathodes corresponds to a higher removal rate. A higher feed rate of silicon wafers of solar cells combined with enough electric power produces fast removal. A precise engineering technology constructed a clean production approach for the removal of surface microstructure layers from silicon wafers is to develop a mass production system for recycling defective or discarded silicon wafers from solar cells that can reduce pollution and lower cost.
环氧薄膜和氮化硅薄膜沉积的低产率是半导体生产中的一个重要因素。提出了一种新的设计系统，该系统使用一组三层叠层状电极作为加工工具，并采用微电去除工艺作为从太阳能电池表面的硅片上去除氮化硅层和环氧薄膜的精密回收工艺。在当前实验中，阳极和阴极的小厚度组合对应于薄膜的较高去除率。阳极和阴极的短长度组合加上足够的电力可实现快速电去除。阳极和阴极的小边缘半径组合对应于较高的去除率。太阳能电池硅片的较高进给速率加上足够的电力可实现快速去除。一种精确的工程技术构建了一种从硅片上去除表面微结构层的清洁生产方法，即开发一种用于回收太阳能电池中缺陷或废弃硅片的大规模生产系统，该系统可以减少污染并降低成本。
