Pa P S
Department of Digital Content Design, Graduate School of Toy and Game Design, National Taipei University of Education, No. 134, Sec. 2, Heping E. Road, Taipei City 106, Taiwan.
J Nanosci Nanotechnol. 2010 Feb;10(2):1381-6. doi: 10.1166/jnn.2010.1864.
A newly design reclamation system using an ultrasonic micro electroetching (UMECE) as a machining process for Indium-tin-oxide(ITO) nanostructured coatings dissolved from a surface of polyethyleneterephthalate (PET) of touch-panel is presented. The design features of the reclamation mechanism and a designed wedge-form tool are of major interest. The low yield of ITO nanostructured coatings is an important factor in optoelectronic semiconductor production. In the current experiment, a small diameter of the anode accompanying with a small distance between the two anodes, reduced the amount of time for effective ultrasonic micro electroetching of ITO since the effect of removal is facilitated by supplying sufficient electrochemical power. The performance of ultrasonics was found to be more effective than pulsed current, requiring no increase in electric power. Additionally, electric power, when combined with a fast feed rate, provides highly effective dissolution. Higher frequency or the greater power of ultrasonics corresponds to a higher dissolution rate for ITO nanostructured coatings. A small anode of the wedge-form tool or a small size of the cathode takes less time for the same amount of ITO removal. Importantly, ultrasonic micro electroetching with the designed wedge-form tool requires only a short period of time to dissolve the ITO's nanostructured coatings easily and cleanly.
本文介绍了一种新设计的回收系统，该系统采用超声微电蚀刻（UMECE）作为加工工艺，用于从触摸屏的聚对苯二甲酸乙二酯（PET）表面溶解的铟锡氧化物（ITO）纳米结构涂层。回收机制的设计特点和设计的楔形工具是主要关注点。ITO纳米结构涂层的低产量是光电半导体生产中的一个重要因素。在当前实验中，阳极直径小且两个阳极之间的距离小，减少了有效超声微电蚀刻ITO的时间，因为通过提供足够的电化学功率促进了去除效果。发现超声的性能比脉冲电流更有效，且无需增加电功率。此外，电功率与快速进给速度相结合时，可提供高效溶解。超声的较高频率或较大功率对应于ITO纳米结构涂层的较高溶解速率。对于相同量的ITO去除，楔形工具的小阳极或阴极的小尺寸所需时间更少。重要的是，使用设计的楔形工具进行超声微电蚀刻只需很短的时间就能轻松、干净地溶解ITO的纳米结构涂层。
