• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

基于石墨烯的宽带光调制器。

A graphene-based broadband optical modulator.

机构信息

NSF Nano-scale Science and Engineering Center, 3112 Etcheverry Hall, University of California at Berkeley, Berkeley, California 94720, USA.

出版信息

Nature. 2011 Jun 2;474(7349):64-7. doi: 10.1038/nature10067. Epub 2011 May 8.

DOI:10.1038/nature10067
PMID:21552277
Abstract

Integrated optical modulators with high modulation speed, small footprint and large optical bandwidth are poised to be the enabling devices for on-chip optical interconnects. Semiconductor modulators have therefore been heavily researched over the past few years. However, the device footprint of silicon-based modulators is of the order of millimetres, owing to its weak electro-optical properties. Germanium and compound semiconductors, on the other hand, face the major challenge of integration with existing silicon electronics and photonics platforms. Integrating silicon modulators with high-quality-factor optical resonators increases the modulation strength, but these devices suffer from intrinsic narrow bandwidth and require sophisticated optical design; they also have stringent fabrication requirements and limited temperature tolerances. Finding a complementary metal-oxide-semiconductor (CMOS)-compatible material with adequate modulation speed and strength has therefore become a task of not only scientific interest, but also industrial importance. Here we experimentally demonstrate a broadband, high-speed, waveguide-integrated electroabsorption modulator based on monolayer graphene. By electrically tuning the Fermi level of the graphene sheet, we demonstrate modulation of the guided light at frequencies over 1 GHz, together with a broad operation spectrum that ranges from 1.35 to 1.6 µm under ambient conditions. The high modulation efficiency of graphene results in an active device area of merely 25 µm(2), which is among the smallest to date. This graphene-based optical modulation mechanism, with combined advantages of compact footprint, low operation voltage and ultrafast modulation speed across a broad range of wavelengths, can enable novel architectures for on-chip optical communications.

摘要

具有高速调制、小尺寸和大光带宽的集成光学调制器有望成为片上光互连的关键器件。因此,在过去几年中,半导体调制器受到了广泛的研究。然而,由于硅的电光性能较弱,其器件尺寸约为毫米量级。另一方面,锗和化合物半导体在与现有的硅电子学和光子学平台集成方面面临着重大挑战。将硅调制器与高品质因数的光学谐振器集成可以提高调制强度,但这些器件固有带宽较窄,需要复杂的光学设计;它们还具有严格的制造要求和有限的温度容限。因此,找到一种具有适当调制速度和强度的互补金属氧化物半导体(CMOS)兼容材料不仅是科学研究的任务,也是工业界的重要任务。在这里,我们通过实验演示了一种基于单层石墨烯的宽带、高速、波导集成电吸收调制器。通过电调谐石墨烯片的费米能级,我们在 1GHz 以上的频率下演示了导光的调制,同时在环境条件下,其工作光谱范围从 1.35μm 到 1.6μm。石墨烯的高调制效率导致有源器件面积仅为 25μm2,这是目前为止最小的之一。这种基于石墨烯的光调制机制具有紧凑的尺寸、低工作电压和超高速调制速度的综合优势,可以为片上光通信提供新的架构。

相似文献

1
A graphene-based broadband optical modulator.基于石墨烯的宽带光调制器。
Nature. 2011 Jun 2;474(7349):64-7. doi: 10.1038/nature10067. Epub 2011 May 8.
2
All-optical graphene-on-silicon slot waveguide modulator based on graphene's Kerr effect.基于石墨烯克尔效应的全光硅基石墨烯槽波导调制器。
Appl Opt. 2021 Sep 10;60(26):7945-7954. doi: 10.1364/AO.427755.
3
Device architectures for low voltage and ultrafast graphene integrated phase modulators.用于低电压和超快石墨烯集成相位调制器的器件架构。
IEEE J Sel Top Quantum Electron. 2021 Spring;27(2):1-9. doi: 10.1109/jstqe.2020.3026357. Epub 2020 Sep 24.
4
Broadband optical modulators based on graphene supercapacitors.基于石墨烯超级电容器的宽带光调制器。
Nano Lett. 2013;13(12):5851-7. doi: 10.1021/nl402616t. Epub 2013 Nov 15.
5
A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor.一种基于金属氧化物半导体电容器的高速硅光调制器。
Nature. 2004 Feb 12;427(6975):615-8. doi: 10.1038/nature02310.
6
A highly efficient thermo-optic microring modulator assisted by graphene.一种由石墨烯辅助的高效热光微环调制器。
Nanoscale. 2015 Dec 21;7(47):20249-55. doi: 10.1039/c5nr05084g. Epub 2015 Nov 18.
7
Hybrid Graphene-Silicon Based Polarization-Insensitive Electro-Absorption Modulator with High-Modulation Efficiency and Ultra-Broad Bandwidth.具有高调制效率和超宽带宽的基于石墨烯-硅的混合偏振不敏感电吸收调制器。
Nanomaterials (Basel). 2019 Jan 27;9(2):157. doi: 10.3390/nano9020157.
8
The all-optical modulator in dielectric-loaded waveguide with graphene-silicon heterojunction structure.具有石墨烯 - 硅异质结结构的介质加载波导中的全光调制器。
Nanotechnology. 2018 Apr 3;29(13):135201. doi: 10.1088/1361-6528/aaa8be.
9
High-speed electro-optic modulator integrated with graphene-boron nitride heterostructure and photonic crystal nanocavity.高速电光调制器与石墨烯-氮化硼异质结构和光子晶体纳米腔集成。
Nano Lett. 2015 Mar 11;15(3):2001-5. doi: 10.1021/nl504860z. Epub 2015 Mar 2.
10
Graphene Photonics I/Q Modulator for Advanced Modulation Formats.用于高级调制格式的石墨烯光子学I/Q调制器
ACS Photonics. 2023 May 4;10(5):1446-1453. doi: 10.1021/acsphotonics.3c00015. eCollection 2023 May 17.

引用本文的文献

1
Roadmap for Photonics with 2D Materials.二维材料光子学路线图
ACS Photonics. 2025 Jul 24;12(8):3961-4095. doi: 10.1021/acsphotonics.5c00353. eCollection 2025 Aug 20.
2
Frequency-multiplexed tunable logic device based on terahertz graphene-integrated metamaterial composed of two circular ring resonator array.基于由两个圆环谐振器阵列组成的太赫兹石墨烯集成超材料的频率复用可调谐逻辑器件。
Sci Rep. 2025 Aug 7;15(1):28920. doi: 10.1038/s41598-025-14311-6.
3
Deciphering photocurrent mechanisms at the nanoscale in van der Waals interfaces for enhanced optoelectronic applications.

本文引用的文献

1
High-speed graphene transistors with a self-aligned nanowire gate.具有自对准纳米线栅的高速石墨烯晶体管。
Nature. 2010 Sep 16;467(7313):305-8. doi: 10.1038/nature09405. Epub 2010 Sep 1.
2
Roll-to-roll production of 30-inch graphene films for transparent electrodes.卷对卷生产 30 英寸的用于透明电极的石墨烯薄膜。
Nat Nanotechnol. 2010 Aug;5(8):574-8. doi: 10.1038/nnano.2010.132. Epub 2010 Jun 20.
3
Graphene transistors.石墨烯晶体管。
解析范德华界面纳米尺度下的光电流机制以增强光电子应用
Sci Adv. 2025 Aug;11(31):eadv7614. doi: 10.1126/sciadv.adv7614. Epub 2025 Jul 30.
4
An Ultra-Narrowband Graphene-Perfect Absorber Based on Bound States in the Continuum of All-Dielectric Metasurfaces.基于全介质超表面连续谱中的束缚态的超窄带石墨烯完美吸收体。
Nanomaterials (Basel). 2025 Jul 19;15(14):1124. doi: 10.3390/nano15141124.
5
Graphene-Loaded LiNbO Directional Coupler: Characteristics and Potential Applications.负载石墨烯的铌酸锂定向耦合器:特性与潜在应用
Nanomaterials (Basel). 2025 Jul 18;15(14):1116. doi: 10.3390/nano15141116.
6
Graphene-based metasurface: dynamic optical control in ultrathin flat optics.基于石墨烯的超表面:超薄平面光学中的动态光学控制。
Nanophotonics. 2025 Apr 22;14(12):2103-2132. doi: 10.1515/nanoph-2025-0052. eCollection 2025 Jun.
7
Boosting classical and quantum nonlinear processes in ultrathin van der Waals materials.增强超薄范德华材料中的经典和量子非线性过程。
Nat Commun. 2025 May 29;16(1):4987. doi: 10.1038/s41467-025-58449-3.
8
Two-Dimensional Materials for Integrated Photonics: Recent Advances and Future Challenges.用于集成光子学的二维材料:最新进展与未来挑战。
Small Sci. 2021 Feb 19;1(4):2000053. doi: 10.1002/smsc.202000053. eCollection 2021 Apr.
9
Switching on Versatility: Recent Advances in Switchable Plasmonic Nanostructures.开启多功能性:可切换等离子体纳米结构的最新进展
Small Sci. 2023 Sep 10;3(10):2300048. doi: 10.1002/smsc.202300048. eCollection 2023 Oct.
10
Thickness- and Wavelength-Dependent Nonlinear Optical Absorption in 2D Layered MXene Films.二维层状MXene薄膜中厚度和波长依赖的非线性光学吸收
Small Sci. 2024 Jun 13;4(8):2400179. doi: 10.1002/smsc.202400179. eCollection 2024 Aug.
Nat Nanotechnol. 2010 Jul;5(7):487-96. doi: 10.1038/nnano.2010.89. Epub 2010 May 30.
4
Materials and mechanics for stretchable electronics.可拉伸电子产品的材料与力学
Science. 2010 Mar 26;327(5973):1603-7. doi: 10.1126/science.1182383.
5
Photo-thermoelectric effect at a graphene interface junction.石墨烯界面结的光热电效应。
Nano Lett. 2010 Feb 10;10(2):562-6. doi: 10.1021/nl903451y.
6
Ultrafast graphene photodetector.超快石墨烯光电探测器。
Nat Nanotechnol. 2009 Dec;4(12):839-43. doi: 10.1038/nnano.2009.292. Epub 2009 Oct 11.
7
Large-area synthesis of high-quality and uniform graphene films on copper foils.在铜箔上大面积合成高质量且均匀的石墨烯薄膜。
Science. 2009 Jun 5;324(5932):1312-4. doi: 10.1126/science.1171245. Epub 2009 May 7.
8
Large-scale pattern growth of graphene films for stretchable transparent electrodes.用于可拉伸透明电极的石墨烯薄膜的大规模图案生长。
Nature. 2009 Feb 5;457(7230):706-10. doi: 10.1038/nature07719. Epub 2009 Jan 14.
9
Measurement of the optical conductivity of graphene.石墨烯光导率的测量。
Phys Rev Lett. 2008 Nov 7;101(19):196405. doi: 10.1103/PhysRevLett.101.196405.
10
Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition.通过化学气相沉积在任意衬底上制备大面积、少层石墨烯薄膜。
Nano Lett. 2009 Jan;9(1):30-5. doi: 10.1021/nl801827v.