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双栅薄膜晶体管、集成电路和传感器。

Dual-gate thin-film transistors, integrated circuits and sensors.

机构信息

Philips Research Laboratories, High Tech Campus, AE Eindhoven, The Netherlands.

出版信息

Adv Mater. 2011 Aug 2;23(29):3231-42. doi: 10.1002/adma.201101493. Epub 2011 Jun 14.

Abstract

The first dual-gate thin-film transistor (DGTFT) was reported in 1981 with CdSe as the semiconductor. Other TFT technologies such as a-Si:H and organic semiconductors have led to additional ways of making DGTFTs. DGTFTs contain a second gate dielectric with a second gate positioned opposite of the first gate. The main advantage is that the threshold voltage can be set as a function of the applied second gate bias. The shift depends on the ratio of the capacitances of the two gate dielectrics. Here we review the fast growing field of DGTFTs. We summarize the reported operational mechanisms, and the application in logic gates and integrated circuits. The second emerging application of DGTFTs is sensitivity enhancement of existing ion-sensitive field-effect transistors (ISFET). The reported sensing mechanism is discussed and an outlook is presented.

摘要

1981 年,首次报道了具有 CdSe 作为半导体的双栅薄膜晶体管(DGTFT)。其他 TFT 技术,如非晶硅(a-Si:H)和有机半导体,已经为制造 DGTFT 提供了更多的途径。DGTFT 包含具有第二个栅极的第二个栅极电介质,第二个栅极与第一个栅极相对放置。主要优点是可以将阈值电压设置为施加的第二栅极偏置的函数。该偏移取决于两个栅极电介质的电容比。在这里,我们回顾了 DGTFT 快速发展的领域。我们总结了报告的工作机制,以及在逻辑门和集成电路中的应用。DGTFT 的第二个新兴应用是增强现有离子敏感场效应晶体管(ISFET)的灵敏度。讨论了报道的传感机制,并提出了展望。

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