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用于新兴场效应晶体管的聚合物栅极电介质与二维半导体的组合

Combination of Polymer Gate Dielectric and Two-Dimensional Semiconductor for Emerging Field-Effect Transistors.

作者信息

Choi Junhwan, Yoo Hocheon

机构信息

Department of Chemical Engineering, Dankook University, 152 Jukjeon-ro, Yongin 16890, Republic of Korea.

Department of Electronic Engineering, Gachon University, 1342 Seongnam-daero, Seongnam 13120, Republic of Korea.

出版信息

Polymers (Basel). 2023 Mar 10;15(6):1395. doi: 10.3390/polym15061395.

Abstract

Two-dimensional (2D) materials are considered attractive semiconducting layers for emerging field-effect transistors owing to their unique electronic and optoelectronic properties. Polymers have been utilized in combination with 2D semiconductors as gate dielectric layers in field-effect transistors (FETs). Despite their distinctive advantages, the applicability of polymer gate dielectric materials for 2D semiconductor FETs has rarely been discussed in a comprehensive manner. Therefore, this paper reviews recent progress relating to 2D semiconductor FETs based on a wide range of polymeric gate dielectric materials, including (1) solution-based polymer dielectrics, (2) vacuum-deposited polymer dielectrics, (3) ferroelectric polymers, and (4) ion gels. Exploiting appropriate materials and corresponding processes, polymer gate dielectrics have enhanced the performance of 2D semiconductor FETs and enabled the development of versatile device structures in energy-efficient ways. Furthermore, FET-based functional electronic devices, such as flash memory devices, photodetectors, ferroelectric memory devices, and flexible electronics, are highlighted in this review. This paper also outlines challenges and opportunities in order to help develop high-performance FETs based on 2D semiconductors and polymer gate dielectrics and realize their practical applications.

摘要

二维(2D)材料因其独特的电子和光电特性,被认为是用于新兴场效应晶体管的有吸引力的半导体层。聚合物已与二维半导体结合用作场效应晶体管(FET)中的栅极介电层。尽管它们具有独特的优势,但聚合物栅极介电材料在二维半导体FET中的适用性很少得到全面讨论。因此,本文综述了基于多种聚合物栅极介电材料的二维半导体FET的最新进展,包括(1)溶液基聚合物电介质,(2)真空沉积聚合物电介质,(3)铁电聚合物,以及(4)离子凝胶。通过利用合适的材料和相应的工艺,聚合物栅极电介质提高了二维半导体FET的性能,并以节能的方式实现了多功能器件结构的开发。此外,本综述还重点介绍了基于FET的功能性电子器件,如闪存器件、光电探测器、铁电存储器件和柔性电子产品。本文还概述了挑战和机遇,以帮助开发基于二维半导体和聚合物栅极电介质的高性能FET,并实现其实际应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6efb/10051946/4137da9e48fc/polymers-15-01395-g001.jpg

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