Boragno C, Felici R
Dipartimento di Fisica, Università di Genova, Via Dodecaneso 33, Genova, Italy.
J Phys Condens Matter. 2009 Jun 3;21(22):224006. doi: 10.1088/0953-8984/21/22/224006. Epub 2009 May 12.
Ion beam sputtering (IBS) can induce the formation of ordered nanostructures, whose properties depend on ion flux, sputtering angle, sample temperature, sample structure, surface symmetry, etc. For the comprehension of the time evolution of the formed nanostructure morphology it is necessary to perform in situ real time studies. In this review we shall describe results obtained using x-ray based techniques at synchrotron facilities to study in situ the time and temperature evolution of metal surfaces nanopatterned by ion sputtering. Different techniques, such as x-ray reflectivity, grazing incidence small angle x-ray scattering and x-ray surface diffraction have been used, each of them providing complementary information for the determination of the surface structure and morphology. In this review, we present some experiments done in recent years to show how these methods contributed to our understanding of the IBS process on metal surfaces.
离子束溅射（IBS）能够诱导有序纳米结构的形成，其性质取决于离子通量、溅射角度、样品温度、样品结构、表面对称性等。为了理解所形成的纳米结构形态的时间演化，有必要进行原位实时研究。在这篇综述中，我们将描述利用同步辐射装置基于X射线的技术所获得的结果，以便原位研究通过离子溅射形成纳米图案的金属表面的时间和温度演化。已经使用了不同的技术，如X射线反射率、掠入射小角X射线散射和X射线表面衍射，它们各自为确定表面结构和形态提供了互补信息。在这篇综述中，我们展示了近年来进行的一些实验，以说明这些方法如何有助于我们理解金属表面的IBS过程。
