Institut Charles Gerhardt de Montpellier, UMR 5253, Université Montpellier II, Place Eugène Bataillon, 34095 Montpellier 5, France.
Opt Lett. 2011 Aug 1;36(15):2922-4. doi: 10.1364/OL.36.002922.
The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (10-20 μm) is demonstrated. These waveguides are constituted of a several micrometer thick Te(82)Ge(18) film deposited onto a Te(75)Ge(15)Ga(10) bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF(3)/O(2)/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.
基于在光谱范围 (10-20 μm) 呈现单模特性的波导的全碲化物集成光学器件的可行性得到了证明。这些波导由几层几微米厚的 Te(82)Ge(18)薄膜构成，该薄膜通过热共蒸发沉积在 Te(75)Ge(15)Ga(10)块状玻璃衬底上，然后在 CHF(3)/O(2)/Ar 气氛下通过反应离子刻蚀进行进一步刻蚀。所得到的结构被证明是具有良好单模传输性能的通道波导，在整个光谱范围内都是如此。这些结果验证了我们在用于空间干涉测量的集成光学模式滤波器制造方面的技术解决方案。
