Photonics and Optoelectronics Group, Physics Department and CeNS, Ludwig-Maximilians-Universität München, Amalienstr. 54, 80799 Munich, Germany.
ACS Nano. 2011 Sep 27;5(9):7377-82. doi: 10.1021/nn2023045. Epub 2011 Aug 10.
We propose and demonstrate a hybrid lithographic technique capable of nanopatterning surfaces by optothermal decomposition of a polymeric film induced by a single metal nanoparticle. A tightly focused laser beam exerting a strong optical force onto the nanoparticle is used to move it inside the polymer film. Due to efficient plasmonic absorption of the laser light, the nanoparticle is heated up to temperatures of several hundred degrees, causing melting or even thermal decomposition of the polymer film. By this method, grooves less than 100 nm wide and tens of micrometers long can be directly milled in a polymer layer.
我们提出并证明了一种混合光刻技术，该技术可以通过单个金属纳米颗粒光热分解聚合物薄膜来实现纳米图案化表面。通过使用强光学力将激光束聚焦到纳米颗粒上，可以将其在聚合物薄膜内移动。由于激光光的高效等离子体吸收，纳米颗粒被加热到几百摄氏度的温度，导致聚合物薄膜的熔化甚至热分解。通过这种方法，可以直接在聚合物层中铣削出小于 100nm 宽、数十微米长的沟槽。
