The passive optical properties of a silicon nanoparticle-embedded benzocyclobutene polymer waveguide.

The passive optical properties of a silicon nanoparticle-embedded benzocyclobutene (BCB) waveguide were investigated. The silicon nanoparticles, of a size varying from 6 to 25 nm, were prepared by vapor condensation. The transmission modes and losses were examined by the prism coupler and cut-back methods. A He-Ne laser beam with a wavelength of 6328 Å was used to measure the effective index and thickness of the waveguide. Laser light could be efficiently coupled into the BCB waveguide when the embedded Si nanoparticles were smaller than 6 nm. The film thickness and effective index of the Si-embedded BCB waveguide were measured to be 1.825 µm and 1.565, respectively. The optical transmission losses of the pure BCB and Si-embedded ridge waveguides measured by the cut-back method were 0.85 and 1.63 dB cm(-1), respectively. Although the optical loss was increased by the embedded Si, the disturbance of the output contour was quite small. This result demonstrates that the nanoparticle-embedded polymer waveguide may be used for optoelectronic integrated circuits.