World Premier International Research Center Advanced Institute for Materials Research, Tohoku University, Sendai, Tohoku, Japan.
Opt Lett. 2011 Sep 1;36(17):3464-6. doi: 10.1364/OL.36.003464.
For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of 900 μm and torsion bar dimensions length 250 μm, width 30 μm and thickness 2.5 μm was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over -270° was obtained from an activation test by permanent magnet that has approximately 0.2 T of magnetic strength. A large mechanical tilting angle of over -70° was obtained by applying approximately 1.1 mT to the mirror when 93 mAwas applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property.
为了提高微镜在驱动过程中的倾斜角度和稳定性等微镜性能，采用铁基金属玻璃（MG）作为扭转杆材料。选择直径为 900 μm 的镜板和扭转杆尺寸长度为 250 μm、宽度为 30 μm、厚度为 2.5 μm 的微镜进行倾斜角度测试，通过永磁体和电磁铁装置进行测试。通过具有约 0.2 T 磁场强度的永磁体的激活测试，获得了超过-270°的超大幅倾斜角度。当向螺线管装置施加 93 mA 的电流时，向镜面施加约 1.1 mT 的磁场，获得了超过-70°的大机械倾斜角度。微镜的大倾斜角度归因于扭转杆，扭转杆由具有大弹性应变极限、断裂韧性和优异磁性能的铁基 MG 薄膜制成。
