Li Haijun, Oldham Kenn R, Wang Thomas D
Opt Express. 2019 May 27;27(11):16296-16307. doi: 10.1364/OE.27.016296.
Microsystems-based scanning technologies can achieve deflection angles of several tens of degrees and translational displacements of a couple hundred microns. Emerging applications need performance with multi-fold greater torsional and translational motion. A compliant lever-based mechanism is introduced into the comb-drive actuators of a MEMS resonant scanner to achieve full-circumferential range and large out-of-plane displacement at ambient pressures. A 1.5 mm diameter mirror is demonstrated that generates 494° total deflection angle and 561 μm translational displacement at either 853 or 956 Hz and either 100 or 90V, respectively. At 40V, an optical scan angle of ~200° and translational displacement of ~310 μm are achieved.
基于微系统的扫描技术能够实现几十度的偏转角和几百微米的平移位移。新兴应用需要具有多倍更大扭转和平移运动的性能。一种基于柔性杠杆的机构被引入到MEMS谐振扫描仪的梳齿驱动致动器中，以在环境压力下实现全周向范围和大的平面外位移。展示了一个直径为1.5毫米的镜子，它在853或956赫兹以及分别为100或90伏的情况下，产生494°的总偏转角和561微米的平移位移。在40伏时，实现了约200°的光学扫描角和约310微米的平移位移。
