Yan Hanfei, Rose Volker, Shu Deming, Lima Enju, Kang Hyon Chol, Conley Ray, Liu Chian, Jahedi Nima, Macrander Albert T, Stephenson G Brian, Holt Martin, Chu Yong S, Lu Ming, Maser Jörg
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA.
Opt Express. 2011 Aug 1;19(16):15069-76. doi: 10.1364/OE.19.015069.
Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.
具有纳米分辨率的硬X射线显微镜,将通过利用X射线独特的表征能力,在材料与器件研究、环境科学和生命科学领域开拓新的前沿。在此,我们报道了利用多层劳厄透镜(MLLs)实现二维纳米聚焦,MLLs是一种衍射光学元件,原则上能够将X射线聚焦到1纳米。我们展示了在12千电子伏特的光子能量下,聚焦到一个半高宽为25×27纳米²的光斑,效率为2%;在19.5千电子伏特的光子能量下,聚焦到一个半高宽为25×40纳米²的光斑,效率为17%。