Chen Tsung-Yu, Chen Yu-Tung, Wang Cheng-Liang, Kempson Ivan M, Lee Wah-Keat, Chu Yong S, Hwu Y, Margaritondo G
Institute of Physics, Academia Sinica, Taipei 115, Taiwan.
Opt Express. 2011 Oct 10;19(21):19919-24. doi: 10.1364/OE.19.019919.
Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.
菲涅耳波带片（450纳米厚的金，最外层带宽度25纳米）在全场透射中用作物镜，使用8千电子伏特的光子时，实现了优于20纳米的空间分辨率和1.5%的效率。同时在不影响分辨率的情况下实现了泽尼克相衬。这些都是通过电子束光刻和电沉积相结合实现高纵横比波带片制造快速进展中的非常重大的成就。
